TSMC

90nm CMOS Logic or MS/RF, Low Power

Provide a general-purpose product for applications with a 1.2V core design and with 2.5 or 3.3V capable IO’s for mobile applications like Cellular, WLAN, BT


Technology characteristics

Shrink technology: NO

Core voltage: 1.2V

I/O voltage: 2.5 or 3.3V

Shallow Trench Isolation (STI)

Wells: Retrograde twin well cmos technology on P-substrate

Tripple Well, Deep N-well (optional)

Multiple Vt options (ulvt, lvt, svt, hvt, native)

Dual gate oxide and tripple gate oxide process

Temperature range: -40C to 125C

# of metals: 3 to 9 (CU) (+ALRDL)

Interconnect material: Cu + AlCu pad

LK inter-metal dielectric for thin metal

Top metal: 5.6 KA, 8.5KA

CMP on STI, contact, via and inter-metal dielectric layers

MoM

Varactors

MS/RF options

MIM capacitor for MS & RF process: 1.0, 1.5, 2.0 fF/µm2(mutually exclusive)

Ultra Low Vt

High-Q copper inductor

Top metal: UTM, 34KA

Dual passivation

Options that need special attention

Fuse SRAM

Wafer size

12 inch

Deliverables

# of dies (no wafer!): 100 dies / wafer (12")

Design tools

PDK: Cadence CDBA and OA

Simulation tools

Hspice, Eldo, Spectre

Verification tools DRC

Cadence, Mentor Graphics

Verification tools LVS

Cadence, Mentor Graphics

Parasitic extraction tools

Cadence, Mentor Graphics

P&R tools

Cadence, Synopsys

Foundry IP

7,9,14-track core cell library, multi-Vt

1.2v/2.5v &1.2V/3.3V Universal Analog I/O compatible with Linear Universal Standard I/O

1.2V/2.5V & 1.2V/3.3V Regular, Linear Universal Standard I/O

1.2V/3.3V, regular, linear standard slim I/O

1.2V/3.3V, hybrid staggered slim I/O library that contains both standard and analog slim I/O

SRAM compilers from 3rd party

MPW block size

16 mm2, flexible aspect ratio

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