TSMC

90nm CMOS Logic or MS/RF, General Purpose

Provide a general-purpose product for applications with a 1.0V core design and with 1.8, 2.5 or 3.3V capable IO’s for digital consumer, Networking , HDD and FPGA


 


Technology characteristics


Shrink technology: NO

Core voltage: 1.0V

I/O voltage: 1.8, 2.5 or 3.3V

Shallow Trench Isolation (STI)

Wells: Retrograde twin well cmos technology on P-substrate

Tripple Well, Deep N-well (optional)

Multiple Vt options (lvt, svt, hvt, native)

Dual gate oxide and tripple gate oxide process

Temperature range: -40C to 125C

# of metals: 3 to 9 (+ALRDL)

Interconnect material: Cu + AlCu pad

LK inter-metal dielectric for thin metal

Top metal: 5.6 KA, 8.5KA

CMP on STI, contact, via and inter-metal dielectric layers

MoM


MS/RF options


MIM capacitor for MS & RF process: 1.0, 1.5, 2.0 fF/µm2(mutually exclusive)

High-Q copper inductor

Top metal: UTM, 34KA

Varactors

Dual passivation


Options that need special attention


Fuse RAM


Wafer size


12 inch


Deliverables


# of dies (no wafer!): 100 dies / wafer (12")


Design tools


PDK: Cadence CDBA, Cadence OA, Mentor, iPDK


Simulation tools


Hspice, Eldo, Spectre


Verification tools DRC


Cadence, Mentor Graphics


Verification tools LVS


Cadence, Mentor Graphics


Parasitic extraction tools


Cadence, Mentor Graphics


P&R tools


Cadence, Synopsys


Foundry IP


7,9,14-track core cell library, multi-Vt

1.0V/2.5V &1.0V/3.3V hybrid staggered slim I/O library that contains both standard and analog slim I/O

1.0V/2.5V &1.0V/3.3V linear staggered slim I/O library that contains both standard and analog slim I/O

1.0v/2.5v, 3.3v tolerant, staggered universal standard I/O

1.0V/3.3V, 5V Tolerant, Staggered Universal Standard I/O

SRAM compilers from 3rd party


MPW block size


16 mm2, flexible aspect ratio


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